文献类型： 外文期刊

作者： Li, Crystal P. L. ¹ ; Ciccolo, Paul ² ; Yee, Dennis K. W. ³ ;

作者机构： 1.Rohm & Haas Elect Mat Asis Ltd, Dow Elect Mat, Interconnect Technol Grp, Fanling, Hong Kong, Peoples R China

2.Rohm & Haas Elect Mat, Dow Elect Mat, Interconnect Technol Grp, Marlborough, MA USA

3.Rohm & Haas Elect Mat Asis Ltd, Dow Elect Mat, Interconnect Technol, Fanling, Hong Kong, Peoples R China

关键词： copper;laminates;metallizing;chemical technology

期刊名称：CIRCUIT WORLD （ 影响因子：0.875； 五年影响因子：0.876 ）

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收录情况： SCI

摘要： Purpose - The purpose of this paper is to present an overview of the alternative testing approaches that may be used to assess interconnect quality and their application to laminate material and plated-through-hole (PTH) process control. Design/methodology/approach - The paper introduces the importance of inner-layer copper reliability and how to evaluate it. It reviews and discusses the effects of all factors involved, including laminate material, panel design, and chemical controls, on interconnect defects (ICDs). Findings - The best possible reliability can only be achieved by implementation of process controls ranging from incoming laminate material inspection to drilling parameters and finally chemical controls within the electroless copper process. Research limitations/implications - This paper focuses on through-hole multilayer reliability. Although blind via reliability shares some aspects with through-hole reliability, there are other factors that only apply to blind vias. This area will be the subject of a future publication. Originality/value - The paper provides an overall review, integrating information on the whole electroless copper process, starting from ICD testing methods, and including the effects of laminate material, desmear, and PTH control. It provides a reference for readers involved in trouble shooting or process improvement.