文献类型： 会议论文

第一作者： E. Forsen

作者： E. Forsen ¹ ; D. Nilsson ² ; S. Ballandras ³ ;

作者机构： 1.Danish Technological Institute, Taastrup, Denmark

2.FEMTO-ST, CNRS-UFC-ENSMM-UTBM, Time and frequency Dept, Besancon, France

3.IMTEK, University of Freiburg, Freiburg, Germany

关键词： Nano Imprint Lithography;Sensors;Surface Acousitc Wave;Lithography.

会议名称： Anniversary Eurosensors Conference

主办单位：

页码： 860-863

摘要： Jet-and-flash nano imprint lithography (NIL) has successfully been utilized for the fabrication of surface acoustic wave (SAW) sensors. These SAW sensors will be used for passive wireless sensing of physical parameters, e.g. the temperature inside gas turbine engines. This is the first time metal lift-off processes based on jet-and-flash NIL have been established on the piezoelectric substrate material lanthanum gallium silicate (Langasite). NIL produced Langasite SAW temperature sensors have successfully been fabricated on various crystal cuts and SAW electrode metallization using Ti/Pt and Ti/Ni have been realized. Langasite based SAW sensors are to be used for passive wireless temperature monitoring at up to 950 degrees Celsius.

分类号： tp212.2