文献类型： 会议论文

第一作者： Martin F. Jensen

作者： Martin F. Jensen ¹ ; Jian Wu ² ; Ultrich Kruhne; Leif Hojslet Christensen; Oliver Geschke;

作者机构： 1.Danish Technological Insitute, Centre for Microtechnology and Surface Analysis. Gregersensvej I, DK-2630 Taastrup, Denmark

2.MIC-

关键词： PMMA;excimer laser;microlenses;micro-machining

会议名称： Micro total analysis systems 2004 :

主办单位：

页码： 46-48

摘要： A method whereby refractive microlenses can be produced in poly-methyl-methacrylate (PMMA) by excimer laser irradiation at X = 248 nm has been developed. The lenses are formed by a combined photochemical and thermal process. The lenses present themselves as depressions in the substrate material (negative focal length), which makes replication necessary in order to obtain lenses with a positive focal length. The method allows for considerable flexibility with respect to the pattern of lenses and the properties of the individual lenses. It is possible to vary the diameter of the lenses between 30 and 500 urn and the focal lengths between 300 u.m and several mm.

分类号： O657.3