文献类型： 会议论文

第一作者： Ed Anzures

作者： Ed Anzures ¹ ; Roger Dangel ² ; Rene Beyeler ² ; Allie Cannon ¹ ; Folkert Horst ² ; Cecilia Kiarie ¹ ; Phil Knudsen ¹ ; Norbert Meier ² ; Matt Moynihan ¹ ; Bert Jan Offrein ² ;

作者机构： 1.Rohm and Haas Electronic Materials LLC, 455 Forest Street, Marlborough, MA, USA 01752

2.IBM Research GmbH, Zurich Research Laboratory, Saumerstrasse 4, CH-8803 Ruschlikon,Switzerland

关键词： optical;interconnect;waveguide;flexible

会议名称： SPIE Conference on Photonics packaging, integration, and interconnects

主办单位：

页码： 72210I:1-72210I:12

摘要： Formulations containing silicon-based polymers have been used for the formation of planar waveguides on flexible substrates. The substrate of choice is compatible with the flexible waveguide and is made of materials commonly utilized in the printed circuit board industry. When the flexible waveguide material is combined with the chosen substrate using processes compatible with printed circuit board manufacturing techniques, the resultant optical interconnects display sufficient flexibility, low optical loss (<0.05 dB/cm at 850 nm), and high reliability.

分类号： N52