文献类型： 会议论文

第一作者： Matt Moynihan

作者： Matt Moynihan ¹ ; Craig Allen ¹ ; Tuan Ho ¹ ; Luke Little ¹ ; Nathan Pawlowski ¹ ; Nick Pugliano ¹ ; Jim Shelnut ¹ ; Bruno Sicard ¹ ; Hai Bin Zheng ¹ ; Garo Khanarian ² ;

作者机构： 1.Shipley Company, LLC, 455 Forest St., Marlborough, MA 01752

2.Rohm and Haas Company, 727 Norristown Rd., Springhouse, PA 19477

会议名称： Linear and Nonlinear Optics of Organic Materials III

主办单位：

页码： 50-60

摘要： There are a number of organic, inorganic, and hybrid inorganic waveguide materials that are currently being used for a wide variety of optical interconnect applications. Depending upon the approach, waveguide formation is performed using a combination of lithographic and/or reactive ion etch (RIE) techniques. Often the processes involved with waveguide formation require unique processing conditions, hazardous process chemicals, and specialized pieces of capital equipment. In addition, many of the materials have been optimized for silicon substrates but are not compatible with printed wire board (PWB) substrates and processes. We have developed compositions and processes suitable for the creation of optical, planar waveguides on both silicon and PWB substrates. Based on silicate technology, these compositions use lithographic techniques to define waveguides, including aqueous, alkaline development. The resulting planar waveguides take advantage of the glass-like nature of silicate chemistry wedded with the simplicity of standard lithographic processes. Attenuation at typical wavelengths has been found to compete well with the non-silicate-based technologies available today. Single-mode (SM) and multi-mode (MM) waveguides with losses ranging from 0.6 dB/cm @ 1550nm, 0.2 dB/cm @1320nm, and ≤0.1 @ 850nm are feasible. Composition, process, and physical properties such as optical, thermal and mechanical properties will be discussed.

分类号： N5